An advanced off-surface matrix cutting method for high-precision fabrication of microlens arrays with minimized edge overcut

Microlens arrays (MLAs) are critical components in advanced optical systems, yet their fabrication faces persistent challenges, particularly edge overcut that degrade optical performance. This study proposes an advanced off-surface matrix cutting method (OMCM) to address these issues. By reorganizing MLAs into a matrix structure and implementing a four-color grouping strategy, OMCM enables non-adjacent machining of microlens units, effectively minimizing edge overcut while maintaining machining efficiency. Experimental validation on a 75 × 75 MLA demonstrated significant advancements in surface quality, achieving surface roughness (Ra) values of 2–4 nm, form accuracy (PV) between 0.025 and 0.110 μm. Systematic analysis revealed the influence of curvature radius (r), radial pitch (Δl_x), and circumferential pitch angle (Δθ_c) on machining quality, highlighting the efficacy of OMCM in balancing precision and efficiency. The proposed OMCM provides a robust solution for high-volume, small-aperture MLA fabrication, advancing applications in beam shaping, optoelectronics, and sensing systems.