Abstract
This paper presents the design of a 240 GHz 3dB quadrature hybrid coupler integrated with thin-film resistors which are monolithically integrated as matched loads based on the rectangular micro-coaxial manufacturing process. The thin-film resistors are fabricated directly on the SU-8 support layer of the micro-coaxial line through compatible sputtering process. This co-fabrication approach could demonstrate the co-design methodology for THz passive integration. Simulation results verify the effectiveness of the design.
| Original language | English |
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| Title of host publication | 2025 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications, IMWS-AMP 2025 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Edition | 2025 |
| ISBN (Electronic) | 9798331525347 |
| DOIs | |
| Publication status | Published - 2025 |
| Externally published | Yes |
| Event | 2025 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications, IMWS-AMP 2025 - Wuxi, China Duration: 23 Jul 2025 → 26 Jul 2025 |
Conference
| Conference | 2025 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications, IMWS-AMP 2025 |
|---|---|
| Country/Territory | China |
| City | Wuxi |
| Period | 23/07/25 → 26/07/25 |
Keywords
- 3dB quadrature hybrid
- coupler
- integrated structure
- rectangular micro-coaxial
- thin-film resistor