摘要
This paper presents the design of a 240 GHz 3dB quadrature hybrid coupler integrated with thin-film resistors which are monolithically integrated as matched loads based on the rectangular micro-coaxial manufacturing process. The thin-film resistors are fabricated directly on the SU-8 support layer of the micro-coaxial line through compatible sputtering process. This co-fabrication approach could demonstrate the co-design methodology for THz passive integration. Simulation results verify the effectiveness of the design.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | 2025 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications, IMWS-AMP 2025 |
| 出版商 | Institute of Electrical and Electronics Engineers Inc. |
| 版本 | 2025 |
| ISBN（电子版） | 9798331525347 |
| DOI | |
| 出版状态 | 已出版 - 2025 |
| 已对外发布 | 是 |
| 活动 | 2025 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications, IMWS-AMP 2025 - Wuxi, 中国 期限: 23 7月 2025 → 26 7月 2025 |
会议
| 会议 | 2025 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications, IMWS-AMP 2025 |
|---|---|
| 国家/地区 | 中国 |
| 市 | Wuxi |
| 时期 | 23/07/25 → 26/07/25 |